Evg 620 manual

 · Demonstration of EVG Bond Aligner performing alignment of two wafers at ClassOne Equipment. manufacturer’s maintenance and operations manuals. This document is for reference only. Users must be trained by Nanofab staff before operating this equipment. Description The EVG mask alignment system is a dual-use tool designed for optical double-side lithography and precision alignment for 2” to 4”. EVG® Bond alignment system up to mm EVG®NT Manual bond alignment with separation flags Introduction Unique Features / System Configuration With the invention of the world's first double sided alignment system in , .

EVG MASK ALIGNER consisting of: Model: EVG - Manual Mask Aligner- Topside Alignment (TSA)- Automatic Alignment- Up to 6'/mm Wafer Capable (with prope. EVG MASK ALIGNER consisting of: Model: EVG - Manual Mask Aligner - Topside Alignment (TSA) - Backside Ailgnment (BSA) - Automatic Alignment - Up to 6"/mm Wafer Capable (with proper chuck) - Objectives (Qty 2) - Vacuum Chuck: request at time of order - Maskholder: request at time of order - Mask Load Frame: request at time of order. James demonstrates the operation of the EVG Mask Aligner at our headquarters in Atlanta, Georgia. This video can be used for basic overview of operation.

Tooling Tray. Uniformity Test Plate. EVG offers Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes. Tooling Exchanges are Quick, Simple and can be Performed Within Minutes. Lamphouse: W Lamphouse Optional W / W Or LED Upgrade Upon Request. Exposure Optics: Type C, nm - nm, Broadband. The EVG ® NT provides state-of-the art mask alignment technology on a minimized footprint area up to mm wafer size. Known for its versatility and reliability, the EVG NT provides state-of-the-art mask alignment technology on a minimized footprint area combined with advanced alignment features and optimized total cost of ownership. DOCUMENT: EVG MASK ALIGNMENT SYSTEM OPERATING PROCEDURES Version: 3 INTRODUCTION Scope These procedures apply to the EVG Mask Alignment Wafer system. All maintenance should follow the procedures set forth in the manufacturer’s maintenance and operations manuals. This document is for reference only.